エピタキシャル装置: MBEコンポーネント

Veeco's Gas Source Delivery System (GSDS) provides precise control of gases, interlocks and monitoring for inert, hazardous and/or flammable gases. Molly^® ECS1 Growth Control Software provides for easy integration to your existing system.

A variety of package options are available to suit your needs, and your budget. All packages are inclusive of manual gas line shut off valve for each circuit, gas filter purifier, mass flow controller and pneumatically controlled run and vent valves.