プロセス装置: 物理蒸着

The Veeco NEXUS TAMR PVD System deposits critical low-loss films that make the optical waveguide of the laser. It features heated deposition capability of the oxide films in "dielectric" and "metal modes" of operation. These innovations enable high deposition rates and low optical loss tantalum pentoxide (Ta2O5) and aluminum oxide (Al2O3) films. The Veeco TAMR PVD System leverages Veeco's production-proven high rate reactive alumina platform and proprietary process control.